Nanopositioning Stages

Closed loop piezo actuated stages. Standard stage materials are as listed in datasheets, alternative materials are available, including Super Invar, stainless steel, titanium and aluminium. Options include vacuum, radiation, high temperature compatibility. Custom designs also available on request.

Available in linear or tilting/rotational formats with both single and multi-axis configurations, Queensgate’s Nanopositioning Stages utilise high performance piezo actuation combined with Queensgates renowned capacitance position feedback to provide complete high performance closed loop systems. When specified with closed loop digital controller, complete plug and play interchangeability can be achieved.

Product Selection
Model Image
Material
Range μm
Load kg
Linearity %
Repeatability nm
NPS-TG-7A
殷瓦36
7 mard
NA
0.03
0.2 urads
NPS-X-15A
不锈钢
15
3
0.005
NA.
NPS-X-15B
15
0.5
0.005
NA.
NPS-X-28C
钛合金
28
10
< 0.007
NA.

Product

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